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  • 28 2026.04

  • Young In ACE Showcases Semiconductor Analysis Solutions at SEMICON China 2026

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Young In ACE, a Korean mass spectrometry company, participated in SEMICON China 2026 together with its Chinese distributor, presenting mass spectrometry-based gas and elemental analysis solutions for semiconductor processes.​

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The exhibition was held from March 25 to 27, 2026, at the Shanghai New International Expo Centre (SNIEC) and is recognized as one of the largest semiconductor industry exhibitions in Asia, bringing together global companies in semiconductor equipment, materials, and process technologies.
At the exhibition, Young In ACE introduced its semiconductor-focused analytical solutions centered on the ACE 1100 IMR-MS and ACE 3000 ICP-MS systems.

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The Importance of Gas Analysis in Semiconductor Processes

Various process gases and hazardous gases are used throughout semiconductor manufacturing, including:


  • - Etching processes
  • - Deposition processes (CVD, ALD)
  • - Cleaning processes

 

Failure to accurately analyze these gases can lead to:

  • - Process defects
  • - Yield loss
  • - Equipment contamination
  • - Safety risks for operators

As a result, real-time gas analysis and precise monitoring have become essential technologies in the semiconductor industry.
 

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Key Trends Observed at SEMICON China

At SEMICON China 2026, several key trends were clearly identified:

 

  • - Increasing demand for real-time process gas analysis
  • - Strengthening environmental and safety regulations
  • - Growing need for ultra-precise process control

Accordingly:

  •  IMR-MS → Real-time process gas analysis
  •  ICP-MS → Ultra-trace contamination analysis

Both technologies are gaining attention as core analytical tools in semiconductor manufacturing.

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ACE 1100 IMR-MS │ Real-Time Gas Analysis for Semiconductor Processes

The ACE 1100 IMR-MS (Ion Molecule Reaction Mass Spectrometer) is a mass spectrometry system capable of real-time analysis of various gases generated during semiconductor processes.

 

Applications in Semiconductor Manufacturing

  •  - Monitoring of process gas concentrations
  •  - Detection of hazardous gas leaks
  •  - Early detection of process anomalies (leaks, contamination)
  •  - Exhaust gas analysis and environmental compliance


Key Features

  •  - Direct analysis without sample pretreatment
  •  - Real-time monitoring of VOCs and process gases
  •  - Stable measurement at low concentrations (ppb to ppt levels)

This system enables immediate detection and response to process conditions in real time.
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ACE 3000 ICP-MS │ Ultra-Trace Elemental Analysis for Semiconductor Applications

The ACE 3000 ICP-MS (Inductively Coupled Plasma Mass Spectrometer) is a high-precision instrument designed for ultra-trace elemental analysis.

In semiconductor manufacturing, metal impurity control is critical for maintaining process quality.


Applications in Semiconductor Industry

  •  - Analysis of metal impurities in ultra-pure water (UPW)
  •  - Quality control of process chemicals
  •  - Wafer contamination analysis
  •  - Trace metal analysis in materials and components


Key Features

  •  - Ultra-trace elemental analysis at the ppt (10⁻¹²) level
  •  - High-sensitivity and high-precision measurement
  •  - Applicable to semiconductor, battery, and display industries

This system plays a key role in detecting trace-level contamination that can impact semiconductor performance.

The Future of Semiconductor Analysis: Real-Time and Ultra-Precision

 

The semiconductor industry continues to advance rapidly:

  •  - Processes are becoming more precise
  •  - Tolerance levels are decreasing
  •  - Faster analytical response is required

 

In this context:

  •  - IMR-MS = Real-time gas analysis
  •  - ICP-MS = Ultra-trace elemental analysis

 

 

These technologies are becoming essential for advanced semiconductor process control.

Moving Forward

Through its participation in SEMICON China 2026, Young In ACE presented its mass spectrometry solutions tailored for semiconductor applications to the global market.

The company will continue to strengthen its competitiveness in semiconductor and advanced industries by:

 

  •  - Participating in global exhibitions
  •  - Expanding partnerships with overseas distributors
  •  - Broadening the application of its analytical technologies

Young In ACE remains committed to advancing mass spectrometry technologies for semiconductor and environmental analysis.

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